Development of Photosensitive Porous Polyimide with Supercritical Carbondioxide (scCO<sub>2</sub>) Extraction
نویسندگان
چکیده
منابع مشابه
Application of Photosensitive Polyimide: Mask Saving Process for Buffer Coating
Issues in the LSI polyimide buffer coating process which uses photosensitive polyimide also as a mask of passivation film etching are reviewed. Change of lithography wave length from g-line to i-line causes the difficulty in the polyimide patterning. However, today's improved polymers, both ester type and ionic type, have enough ability to open 10 um windows. Dry etching condition must be adjus...
متن کاملPhotosensitive porous silicon based structures
We present results of electrical and photoelectrical measurements on two types of Al/porous silicon (PS)/monocrystalline silicon (c-Si)/Al sandwich structures with thin and thick PS layers obtained by stain etching. Current-voltage characteristics and photosensitivity spectra indicate that for structures with a thin PS layer the photosensitivity is determined by PS/c-Si heterojunctions (HJ), wh...
متن کاملPhotosensitive-polyimide based method for fabricating various neural electrode architectures
An extensive photosensitive-polyimide (PSPI)-based method for designing and fabricating various neural electrode architectures was developed. The method aims to broaden the design flexibility and expand the fabrication capability for neural electrodes to improve the quality of recorded signals and integrate other functions. After characterizing PSPI's properties for micromachining processes, we...
متن کاملSupercritical Fluid Extraction+supercritical Fluid Chromatography
high pressures also requires special equipment. In summary, both RESS crystallization and SAS crystallization appear to be promising methods for generating supersaturation and therefore represent alternatives to conventional crystallization. Such alternatives may prove attractive in applications such as polymer and pharmaceutical processing, or in particle design for drug delivery. It is possib...
متن کاملDevelopment of Environmental Analysis Methods Using Supercritical Fluid Extraction and Supercritical Fluid Chromatography
Supercritical fluid chromatography (SFC) was first attempted in 1962 [1]. Although several papers on SFC were published during the subsequent two decades [2], their content did not encourage many researchers to investigate this technique. After the introduction of fused-silica capillary SFC in the early 1980s [3], many papers describing fundamental studies as well as application studies appeare...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Seikei-Kakou
سال: 2005
ISSN: 0915-4027,1883-7417
DOI: 10.4325/seikeikakou.17.475